سال انتشار: ۱۳۸۳

محل انتشار: دوازدهیمن کنفرانس مهندسی برق ایران

تعداد صفحات: ۶

نویسنده(ها):

Dariush Javan – Urmia University
Ebrahim Abbaspour – Urmia University

چکیده:

This paper describes the design of a gasflow meter using silicon bulk micromachining technology. The sensor is a thermal type device and
consists of a micro heater and two temperature sensorssituated at the left and right side of the heating element(Ru,Rd) on a stacked SiO2 / Si3N4 thermally isolatedmembrane. The sensor works on the bases of displacement of temperature profile around the heating element with the gas flow. Ansys/Flotran software has been used for thermal and fluid simulations. The simulation results provide the optimum distance between the central heating element and two sensing elements in the range of 200μm. Also, the required heater temperature found to be in the range of 393 K.