سال انتشار: ۱۳۸۵

محل انتشار: چهاردهمین کنفرانس مهندسی برق ایران

تعداد صفحات: ۵

نویسنده(ها):

N. Izadi – Thin Film Lab, ECE Dept., University of Tehran
Y. Komijany – Thin Film Lab, ECE Dept., University of Tehran, ECE Dept., Photonics Lab, University of Tehran
B. Khadem Hosseinieh – Thin Film Lab, ECE Dept., University of Tehran, ECE Dept., Photonics Lab, University of Tehran
S. Mohajerzadeh – Thin Film Lab, ECE Dept., University of Tehran

چکیده:

Using a novel technique for deep vertical etching of PET, realization of 3D structures is investigated. Fabrication of these structures including Photonic Crystals, Spectrometer, 3D Inductors and some other MEMS devices is achieved using a highly flexible PET itself or as a mold to build desirable shapes.